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Fully automatic PECVD
Functional layout
Overall effect chart
1、Products overview
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.
1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.
1.2asic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.
The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision.
2、Technical parameters
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.
1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.
1.2asic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.
The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision.
2、Technical parameters
|
设备名称 Device name |
PECVD石墨舟装卸片机 PECVD graphite boat loading and unloading machine technique |
|
型号规格 Specifications |
PE-3800 |
|
适用石墨舟 Apply the graphite boat |
CT-21-240改造 CT-21-240transform |
|
工位数量 Location number |
两个石墨舟工位分别为A石墨舟工位B石墨舟工位 Two graphite boat station is A graphite boat station B graphite boat station respectively |
|
换盒传送 In box transfer |
伺服定位，自动换盒，更换片盒时设备不停机， Servo positioning, automatic switch box, replacing disc devices do not stop， |
|
硅片上、下料方式 Silicon wafers, blanking mode |
上料方式：50/62/100片花篮上料；下料方式：堆叠收集 Feeding way: 50/62/100 slice of flower basket; Blanking: stacked collection |
|
产能 Capacity |
3800片/小时（备注：21片石墨舟）以此为准 3800 pieces per hour (note: 21 pieces of graphite boat) to shall prevail |
|
压缩空气 Compressed air |
压力：≥0.6Mpa pressure：≥0.6Mpa |
|
运行时间 Uptime |
>98% |
|
电源 Power |
AC380V（单相三线制）/50Hz AC380V（Single-phase three-wire system）/50Hz |
|
整机功率 Engine power |
6KW |
|
执行系统 Perform system |
史陶比尔TX90L智能机器人 Staubli TX90L intelligent robot |